JPS6323286Y2 - - Google Patents

Info

Publication number
JPS6323286Y2
JPS6323286Y2 JP4233580U JP4233580U JPS6323286Y2 JP S6323286 Y2 JPS6323286 Y2 JP S6323286Y2 JP 4233580 U JP4233580 U JP 4233580U JP 4233580 U JP4233580 U JP 4233580U JP S6323286 Y2 JPS6323286 Y2 JP S6323286Y2
Authority
JP
Japan
Prior art keywords
film
chamber
mounting table
vacuum
lower film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4233580U
Other languages
English (en)
Japanese (ja)
Other versions
JPS56144706U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4233580U priority Critical patent/JPS6323286Y2/ja
Publication of JPS56144706U publication Critical patent/JPS56144706U/ja
Application granted granted Critical
Publication of JPS6323286Y2 publication Critical patent/JPS6323286Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Vacuum Packaging (AREA)
JP4233580U 1980-04-01 1980-04-01 Expired JPS6323286Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4233580U JPS6323286Y2 (en]) 1980-04-01 1980-04-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4233580U JPS6323286Y2 (en]) 1980-04-01 1980-04-01

Publications (2)

Publication Number Publication Date
JPS56144706U JPS56144706U (en]) 1981-10-31
JPS6323286Y2 true JPS6323286Y2 (en]) 1988-06-27

Family

ID=29637714

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4233580U Expired JPS6323286Y2 (en]) 1980-04-01 1980-04-01

Country Status (1)

Country Link
JP (1) JPS6323286Y2 (en])

Also Published As

Publication number Publication date
JPS56144706U (en]) 1981-10-31

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